Laser emission:
- The laser generates a high-energy laser beam, typically with a wavelength of 1064nm or 355nm.
- The laser beam is focused into a small spot with high energy density by a galvanometer system.
Laser-contaminant interaction:
- Photothermal effect: When the laser beam strikes the contaminant surface, the energy is absorbed, rapidly heating the contaminant to the point of vaporization.
- Photoablation effect: The laser pulse generates transient thermal expansion, disrupting the bond between the contaminant and the substrate, leading to ablation.
Photochemical effect:
- The laser energy breaks the molecular bonds of the contaminant, achieving chemical cleaning.
Shock wave effect:
- The pulsed laser creates a tiny plasma explosion, generating a shock wave that shatters or ejects the contaminant.
Contaminant removal:
- Contaminants are released from the surface as gas, vapor, or particles, partially removed by an exhaust system.
- The substrate remains intact due to its low absorption rate.
Control and scanning:
- The galvanometer system controls the laser beam's rapid scanning, covering the cleaning area along a pre-set path. Computer software adjusts laser power, frequency, pulse width, and scanning speed.